On the mechanical behaviour of thin perforated plates and their application in silicon condenser microphones
作者： M Pedersen , W Olthuis , P Bergveld
DOI: 10.1016/S0924-4247(95)01189-7
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摘要: In this paper an alternative approach to the modelling of plates with a large number holes is presented. By means plate theory, it shown that perforated can be modelled by conventional orthotropic modified elastic properties. The modification constants derived equalizing strain-energy and plate. model obtained then compared previous methods applied in electrochemical simulation silicon micromachined microphone structure. structures are simulated numerically, using algorithm based on finite differences.
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Douglas Bynum, J. B. Mahoney, M. M. Lemcoe, Analysis of a perforated circular plate containing a rectangular array of holes Welding Research Council. ,(1962)
SPTS Woinowsky-Krieger, S Timoshenko, None, THEORY OF PLATES AND SHELLS Engineering Societies Monographs. ,(1959)
James O. Wilkes, H. A. Luther, Brice Carnahan, Applied numerical methods ,(1969)
J. Bergqvist, F. Rudolf, A silicon condenser microphone using bond and etch-back technology Sensors and Actuators A-physical. ,vol. 45, pp. 115- 124 ,(1994) , 10.1016/0924-4247(94)00833-7
J. Bergqvist, Finite-element modelling and characterization of a silicon condenser microphone with a highly perforated backplate Sensors and Actuators A-physical. ,vol. 39, pp. 191- 200 ,(1993) , 10.1016/0924-4247(93)80219-7
Ki-Won Lee, K.D. Wise, SENSIM: A simulation program for solid-state pressure sensors IEEE Transactions on Electron Devices. ,vol. 29, pp. 34- 41 ,(1982) , 10.1109/T-ED.1982.20655
P.R. Scheeper, A.G.H. van der Donk, W. Olthuis, P. Bergveld, Fabrication of silicon condenser microphones using single wafer technology IEEE\/ASME Journal of Microelectromechanical Systems. ,vol. 1, pp. 147- 154 ,(1992) , 10.1109/84.186394
G. Horvay, Bending of Honeycombs and of Perforated Plates Journal of Applied Mechanics. ,vol. 19, pp. 122- 123 ,(1952) , 10.1115/1.4010416