Accurate ion beam analysis in the presence of surface roughness

摘要: Ion beam analysis (IBA) is a powerful materials characterization technique with very wide applicability. However, despite the fact that most natural and many industrial samples are rough, there currently no way to correctly take severe roughness into account when processing IBA spectra from rough samples, without resorting Monte Carlo calculations which too slow for routine use. In this work we demonstrate new approach parametrizes calculation so analytical codes can rapidly calculate effect of asperities variety surfaces. We successfully apply method real samples. This algorithm allows us overcome longstanding problem correct depth profiling these common hence dramatically increasing power technique. It also extract physically meaningful parameters on whose cannot be easily measured directly.