Growth and characterization of ultrathin nitrided silicon oxide films

作者: E. P. Gusev , H.-C. Lu , E. L. Garfunkel , T. Gustafsson , M. L. Green

DOI: 10.1147/RD.433.0265

关键词:

摘要: … An important property of nitrogen in nitrided oxides is that it forms a barrier against the … , nitric oxide, and other dopants, significantly slowing the rate of further oxidation or nitridation [21, …

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