THERMODYNAMICS OF SILICON NITRIDE Standard molar enthalpy of formation of amorphous Si3N4 at 298.15 K
作者： I. Tomaszkiewicz
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摘要: The standard molar enthalpy of formation ΔfHm0=–760±12 kJ for amorphous silicon nitride a-Si3N4 has been determined from fluorine combustion calorimetry measurements the massic energy reaction: a-Si3N4(s)+6F2(g)=3SiF4(g)+2N2(g). This value combined with ΔfHm0= –828.9±3.4 indicates that first time change transition to α-crystalline form ΔtrsHm0=69±13 is very evident, in spite its large uncertainty range resulting impurity corrections.
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