Structure and hardness of quaternary TiZrSiN thin films deposited by reactive magnetron co-sputtering
作者： IA Saladukhin , G Abadias , A Michel , VV Uglov , SV Zlotski
DOI: 10.1016/J.TSF.2014.11.020
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摘要: … Meanwhile, there are no data reported on the equilibrium phases in the Ti–Zr–Si–N system. … Si/(Ti + Zr + Si) concentration ratio, … Si/(Ti + Zr + Si) concentration ratio, …
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