Magnetron sputtering coating device, a nano-multilayer film, and the preparation method thereof
作者： Meina Wang , Lingling Li , Gong Jin , Gang Wang , Jiangping Tu
DOI:
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摘要: A magnetron sputtering coating device includes a deposition chamber, cathodes, rotating stand within the support platform on stand, first rotation system for driving to rotate around central axis of and baffle fixed stand. The cathodes are arranged perpendicular
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