Stress relaxation and stability in thick amorphous carbon films deposited in layer structure
作者： M. Gioti , S. Logothetidis , C. Charitidis
DOI: 10.1063/1.121749
关键词:
摘要: … amorphous carbon films in sequential layers and studied their intrinsic stress, composition, and stress relief … positive-layer A/negative-layer BVb . In situ spectroscopic ellipsometry and …
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