Aromatic polyacetals and articles comprising them
作者： Duane R. Romer , John B. Etienne , Matthias S. Ober , Pulikkottil J. Thomas
DOI:
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摘要: A polymer includes repeat units having the structure wherein R1, R2, Ar1, Ar2, and Ar3 are defined herein. The can be prepared by Suzuki polycondensation. acetal and/or ketal functionality in backbone make backbone-cleavable acid. is useful applications including lithographic photoresists.
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