Electrical and optical characteristics of boron carbon nitride films synthesized by plasma-assisted chemical vapor deposition
作者： Tadao Yuki , Shuichi Umeda , Takashi Sugino
DOI: 10.1016/J.DIAMOND.2004.01.005
关键词:
摘要: Polycrystalline boron carbon nitride (BCN) films have been synthesized by plasma-assisted chemical vapor deposition and characterized Fourier transform infrared absorption (FTIR), X-ray photoelectron spectroscopy (XPS) ultraviolet–visible transmission analysis along with electrical measurement. Optical properties of BCN vary strongly depending on the C composition ratio. The bandgap film decreases from 5.3 to 3.4 eV increasing ratio 9 30%. resistivity 1×1012 3.4×109 Ω cm 6 exhibit thermally activated conduction mechanism. activation energy varies 0.52 0.36 component. However, other mechanisms are discussed, as well.
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