Characterization of BCN films synthesized by radiofrequency plasma enhanced chemical vapor deposition
作者： Md. Abdul Mannan , Masamitsu Nagano , Tetsuya Kida , Norie Hirao , Yuji Baba
DOI: 10.1016/J.JPCS.2008.08.013
关键词:
摘要: … In this work, the sp 2 -bonded BCN (sp 2 -BCN) films were synthesized … the formation of the BCN atomic hybrid configurations. The … aC:H thin films deposited by radio-frequency plasma: …
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Masahiro Mieno, Tadao Satoh, Study of BCN compounds prepared by the chemical vapor deposition with dimethylamineborane Journal of Materials Science. ,vol. 36, pp. 3925- 3931 ,(2001) , 10.1023/A:1017966004367
Tadao Yuki, Shuichi Umeda, Takashi Sugino, Electrical and optical characteristics of boron carbon nitride films synthesized by plasma-assisted chemical vapor deposition Diamond and Related Materials. ,vol. 13, pp. 1130- 1134 ,(2004) , 10.1016/J.DIAMOND.2004.01.005
C. Morant, P. Prieto, J. Bareño, J.M. Sanz, E. Elizalde, Hard BCxNy thin films grown by dual ion beam sputtering Thin Solid Films. ,vol. 515, pp. 207- 211 ,(2006) , 10.1016/J.TSF.2005.12.063
E Tomasella, C Meunier, S Mikhailov, a-C:H thin films deposited by radio-frequency plasma: influence of gas composition on structure, optical properties and stress levels Surface & Coatings Technology. ,vol. 141, pp. 286- 296 ,(2001) , 10.1016/S0257-8972(01)01271-3
Walter R. L. Lambrecht, Benjamin Segall, Anomalous band-gap behavior and phase stability of c-BN-diamond alloys. Physical Review B. ,vol. 47, pp. 9289- 9296 ,(1993) , 10.1103/PHYSREVB.47.9289
Md. Nizam Uddin, Iwao Shimoyama, Yuji Baba, Tetsuhiro Sekiguchi, Masamitsu Nagano, X-ray photoelectron spectroscopic observation on B–C–N hybrids synthesized by ion beam deposition of borazine Journal of Vacuum Science and Technology. ,vol. 23, pp. 497- 502 ,(2005) , 10.1116/1.1894667
H.S. Kim, I.H. Choi, Y.-J. Baik, Characteristics of carbon incorporated BN films deposited by radio frequency PACVD Surface & Coatings Technology. ,vol. 133, pp. 473- 477 ,(2000) , 10.1016/S0257-8972(00)00924-5
N Laidani, M Anderle, R Canteri, L Elia, A Luches, M Martino, V Micheli, G Speranza, Structural and compositional study of B-C-N films produced by laser ablation of B4C targets in N2 atmosphere Applied Surface Science. ,vol. 157, pp. 135- 144 ,(2000) , 10.1016/S0169-4332(99)00559-0
Z.F Zhou, I Bello, M.K Lei, K.Y Li, C.S Lee, S.T Lee, Synthesis and characterization of boron carbon nitride films by radio frequency magnetron sputtering Surface & Coatings Technology. pp. 334- 340 ,(2000) , 10.1016/S0257-8972(00)00600-9
Lihua Liu, Yuxin Wang, Kecheng Feng, Yingai Li, Weiqing Li, Chunhong Zhao, Yongnian Zhao, Preparation of boron carbon nitride thin films by radio frequency magnetron sputtering Applied Surface Science. ,vol. 252, pp. 4185- 4189 ,(2006) , 10.1016/J.APSUSC.2005.06.025