Interlayer dielectric void detection
作者： Michael K. Templeton , Bhanwar Singh , Bharath Rangarajan , Arvind Halliyal
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摘要: A system for detecting voids in an ILD layer is provided. The includes one or more light sources, each source directing to respective portions of the layer. Light reflected from collected by a measuring that processes light. indicative presence provides void related data processor determines whether exist selectively marks facilitate further processing and/or destruction IC with voids.
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