Low-K dielectric layer and porogen
作者： Yu-Yun Peng , Keng-Chu Lin , Joung-Wei Liou , Hui-Chun Yang
DOI:
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摘要: A system and method for a low-k dielectric layer are provided. preferred embodiment comprises forming matrix porogen within the matrix. The an organic ring structure with fewer than fifteen carbons large percentage of single bonds. Additionally, may have viscosity greater 1.3 Reynolds numbers less 0.5.
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