Effect of substrates temperature on structural and optical properties indium tin oxide prepared by RF magnetron sputtering
作者： Mohammad Farid Bin Mohd Nasir , Mohamad Hafiz Mamat
DOI: 10.1109/SCORED.2016.7810082
关键词:
摘要: This project has been focused on the structural and optical properties respectively effect of indium tin oxide (ITO) thin films at different substrates temperature. The temperature is varied room temperature, 100°C, 200°C, 300°C 400 °C as parameter to optimize quality. ITO were deposited onto glass using RF magnetron sputtering (In-Sn, 90–10%) targets. was involved with three phases, which are preparation, deposition characterization. characterized field emission scanning electron microscopy (FESEM), atomic force (AFM) ultraviolet-visible-near-infrared (UV-Vis-NIR) spectrophotometer (Perkin Elmer Lambda 750) for properties. absorption coefficient spectrum obtained shows all exhibit very low in visible (400–800nm) near infrared (NIR) (>800nm) range but high UV range. samples show higher transmittance more than 80% 350 nm.
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sci-hub.se 参考文章(25)
J Zhang, K.H Au, Z.Q Zhu, S O'Shea, Sol–gel preparation of poly(ethylene glycol) doped indium tin oxide thin films for sensing applications Optical Materials. ,vol. 26, pp. 47- 55 ,(2004) , 10.1016/J.OPTMAT.2004.01.018
Yu Lingmin, Fan Xinhui, Qi Lijun, Ma Lihe, Yan Wen, Dependence of morphologies for SnO2 nanostructures on their sensing property Applied Surface Science. ,vol. 257, pp. 3140- 3144 ,(2011) , 10.1016/J.APSUSC.2010.11.013
Hamid Reza Fallah, Mohsen Ghasemi, Ali Hassanzadeh, Hadi Steki, The effect of deposition rate on electrical, optical and structural properties of tin-doped indium oxide (ITO) films on glass at low substrate temperature Physica B-condensed Matter. ,vol. 373, pp. 274- 279 ,(2006) , 10.1016/J.PHYSB.2005.11.159
Petr Macháč, Bohumil Barda, Jaroslav Maixner, Structural characterization of nickel titanium film on silicon carbide Applied Surface Science. ,vol. 254, pp. 1691- 1693 ,(2008) , 10.1016/J.APSUSC.2007.07.130
C.T. Hsu, Epitaxial growth of II–VI compound semiconductors by atomic layer epitaxy Thin Solid Films. ,vol. 335, pp. 284- 291 ,(1998) , 10.1016/S0040-6090(98)00950-X
A. Baserga, V. Russo, F. Di Fonzo, A. Bailini, D. Cattaneo, C.S. Casari, A. Li Bassi, C.E. Bottani, Nanostructured tungsten oxide with controlled properties: Synthesis and Raman characterization Thin Solid Films. ,vol. 515, pp. 6465- 6469 ,(2007) , 10.1016/J.TSF.2006.11.067
Yuxiang Qin, Ming Hu, Effects of microwave plasma treatment on the field emission properties of printed carbon nanotubes/Ag nano-particles films Applied Surface Science. ,vol. 254, pp. 1757- 1762 ,(2008) , 10.1016/J.APSUSC.2007.07.174
E. Sarantopoulou, Z. Kollia, A.C. Cefalas, K. Manoli, M. Sanopoulou, D. Goustouridis, S. Chatzandroulis, I. Raptis, Surface nano/micro functionalization of PMMA thin films by 157 nm irradiation for sensing applications Applied Surface Science. ,vol. 254, pp. 1710- 1719 ,(2008) , 10.1016/J.APSUSC.2007.07.138
Ding-Fwu Lii, Jow-Lay Huang, Bor-Yuan Shew, Modeling of reactively sputtered TiAlN films Thin Solid Films. ,vol. 335, pp. 122- 126 ,(1998) , 10.1016/S0040-6090(98)00969-9
A.N. Khodan, S. Guyard, J.-P. Contour, D.-G. Crété, E. Jacquet, K. Bouzehouane, Pulsed Laser Deposition of epitaxial SrTiO3 films: Growth,structure and functional properties Thin Solid Films. ,vol. 515, pp. 6422- 6432 ,(2007) , 10.1016/J.TSF.2006.11.099