Thermal deposition and characterization of Se-Sn mixed oxide thin films for NO gas sensing applications

作者: D. Manno , G. Micocci , A. Serra , A. Tepore

DOI: 10.1063/1.366568

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摘要: Thin films made by a mixing of selenium and tin oxides have been obtained high vacuum thermal evaporation. A detailed optical, electrical structural characterization has performed on all deposited films. Electron microscopy observations show that the consist nanosized grains SeO2 SnO2 homogeneously arranged. The NO gas sensing properties this material tested in controlled atmosphere. In addition, influence oxygen test mixture was analyzed.

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