Filtered arc deposition of amorphous diamond
作者： Richard Lossy , David L. Pappas , Ronnen A. Roy , Jerome J. Cuomo , Vivek M. Sura
DOI: 10.1063/1.108208
关键词:
摘要: A cathodic arc with beam filter is employed for the deposition of hydrogen‐free amorphous carbon films. linear used to prevent macroparticles and nonionized atoms from reaching substrate. The deposited films are characterized by their optical mechanical behavior. Depending on conditions, band gaps in range 2.1–2.4 eV measured. Mechanical properties investigated using nanoindentation method shown approach those natural diamond. To our knowledge, data obtained thus far reveal these be more diamondlike than prepared any other nonhydrogenated
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