Silicon micromachined hollow optical waveguides for sensing applications
作者： R. Bernini , S. Campopiano , L. Zeni
DOI: 10.1109/2944.991405
关键词:
摘要: Novel micromachined optical waveguides useful for sensing applications are proposed. The waveguide is designed as hollow-core antiresonant reflecting (ARROW) and can be easily fabricated using standard silicon micromachining techniques. hollow structure permits to use the core confine simultaneously light substance probed, leading an increase of interaction efficiency. Numerical simulations, performed finite element method technique, show that with a suitable design these used in applications, where substances under test gases or liquids.
harvard.edu
sci-hub.se 参考文章(10)
Axel Grosse, Matthias Grewe, Henning Fouckhardt, Deep wet etching of fused silica glass for hollow capillary optical leaky waveguides in microfluidic devices Journal of Micromechanics and Microengineering. ,vol. 11, pp. 257- 262 ,(2001) , 10.1088/0960-1317/11/3/315
J.N. McMullin, R. Narendra, C.R. James, Hollow metallic waveguides in silicon V-grooves IEEE Photonics Technology Letters. ,vol. 5, pp. 1080- 1082 ,(1993) , 10.1109/68.257198
M. Cantin, C. Carignan, R. Côté, M. A. Duguay, R. Larose, P. LeBel, F. Ouellette, Remotely switched hollow-core antiresonant reflecting optical waveguide. Optics Letters. ,vol. 16, pp. 1738- 1740 ,(1991) , 10.1364/OL.16.001738
Yasunori Saito, Tatsunori Kanaya, Akio Nomura, Tetsuo Kano, Experimental trial of a hollow-core waveguide used as an absorption cell for concentration measurement of NH 3 gas with a CO 2 laser Optics Letters. ,vol. 18, pp. 2150- 2152 ,(1993) , 10.1364/OL.18.002150
J.-L. Archambault, R.J. Black, S. Lacroix, J. Bures, Loss calculations for antiresonant waveguides Journal of Lightwave Technology. ,vol. 11, pp. 416- 423 ,(1993) , 10.1109/50.219574
T. Baba, Y. Kokubin, T. Sakaki, K. Iga, Loss reduction of an ARROW waveguide in shorter wavelength and its stack configuration Journal of Lightwave Technology. ,vol. 6, pp. 1440- 1445 ,(1988) , 10.1109/50.7894
W. Huang, R.M. Shubair, A. Nathan, Y.L. Chow, The model characteristics of ARROW structures Journal of Lightwave Technology. ,vol. 10, pp. 1015- 1022 ,(1992) , 10.1109/50.156840
G. Pandraud, G. Veldhuis, J.W. Berenschot, A.J. Nijdam, H.J.W.M. Hoekstra, O. Parriaux, P.V. Lambeck, Micromachining of high-contrast optical waveguides in [111] silicon wafers IEEE Photonics Technology Letters. ,vol. 12, pp. 308- 310 ,(2000) , 10.1109/68.826923
G.J. Veldhuis, O. Parriaux, H.J.W.M. Hoekstra, P.V. Lambeck, Sensitivity enhancement in evanescent optical waveguide sensors Journal of Lightwave Technology. ,vol. 18, pp. 677- 682 ,(2000) , 10.1109/50.842082
Edward D. Palik, Handbook of Optical Constants of Solids ,(1985)