Transient Phosphorus Diffusion Below the Amorphization Threshold
作者： Martin D. Giles
DOI: 10.1149/1.2085734
关键词:
摘要: … If extended defects can be neglected, point defect diffusion … diffusion, this work considers implantation of phosphorus at … properties and defect-coupled diffusion. We begin by presenting …
ecsdl.org参考文章(0)