Depth profiling of ultra thin film using laser induced fluorescence spectroscopy under normal incidence conditions based on the reciprocal principle.

摘要: Depth profiling for thin film sample using laser induced fluorescence spectroscopy under normal incidence conditions, based on the principle of reciprocity, was studied. A laminated Langmuir–Blodgett model (187 nm in thickness) with a concentration depth profile which varies as stair-like function 20.8 steps prepared. Using this sample, observation angle dependence intensity compared theoretical results and it shown that held having continuous profile. Secondly, these data were used to reconstruct by least square method. The quantitative obtained satisfactory. This method can be samples thinner than wavelength excitation light its spatial resolution direction is estimated order na...