Solid-state imaging device and method for making the same, and imaging apparatus

作者: Hiroyasu Matsugai

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摘要: A solid-state imaging device includes a light receiving unit formed in semiconductor base and configured to perform photoelectric conversion; an insulating layer disposed on the base; film constituting cladding of waveguide together with being outer part interior hole by coating, above unit; core waveguide, composed material having higher refractive index than for inner hole; lens integrated surface at bottom interface between coating core.

参考文章(19)
Ramkrishna Ghoshal, Shom S. Ponoth, Navnit T. Agarwal, Peter D. Persans, Joel Plawsky, Siloxane optical waveguides ,(2002)
Duk-min Yi, Hyoun-Min Baek, CMOS image sensor and method of manufacturing same ,(2005)
Yoshinori Toumiya, Haruhiko Ajisawa, Keiji Tatani, Tetsuhiro Iwashita, Yuji Inoue, Hideaki Kato, Solid-state image pickup device, method for manufacturing solid-state image pickup device, and camera ,(2007)
Takayuki Sakai, Toshihiko Kitamura, Takashi Doi, Masaaki Ogawa, Atsuko Yamashita, Solid-state imaging device and method of manufacturing same ,(2007)
Jason C. Heikenfeld, Andrew J. Steckl, Light emissive display based on lightwave coupling ,(2004)
Punit P. Chiniwalla, Russell A. Budd, Chirag S. Patel, Silicon based optical vias ,(2003)
Tomoyuki Hirano, Solid-state imaging element ,(2009)
Kazutoshi Yatsuda, Shigemi Ohtsu, Eiichi Akutsu, Keishi Shimizu, Akira Fujii, Toshihiko Suzuki, Lens-incorporating optical waveguide, and method for manufacturing the same ,(2006)