作者: Wang Hung Cho , Tsai Jiunyu , Tu Tsun Chung , Chuang Harry-Hak-Lay , Huang Sheng-Huang
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摘要: The present disclosure relates to a method of forming an integrated chip. includes ILD layer over memory device substrate. A hard mask structure is formed the and patterning structure. has sidewalls defining first opening directly centered along line perpendicular upper surface second parallel line. laterally offset from by non-zero distance. etched below overlap openings define top electrode via hole. hole with conductive material.