Influence of Subsurface Hybrid Material Growth on the Mechanical Properties of Atomic Layer Deposited Thin Films on Polymers
作者： Yujie Sun , Richard P. Padbury , Halil I. Akyildiz , Matthew P. Goertz , Jeremy A. Palmer
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摘要: The mechanical properties of atomic layer deposition (ALD) coatings play a key role in their long-term use as encapsulation barriers for organic-based, flexible, electronic devices. Nano-indentation characteristics and flexure testing nanometer-scale alumina on polyamide 6 (PA6) films are investigated to determine the influence sub-surface hybrid formed during ALD process. This is observed affect performance thin films, particular at lower processing temperatures. work has important consequences how materials need be applied evaluated polymers application barrier layers.
sci-hub.se 参考文章(35)
M. D. Groner, S. M. George, R. S. McLean, P. F. Carcia, Gas diffusion barriers on polymers using Al2O3 atomic layer deposition Applied Physics Letters. ,vol. 88, pp. 051907- ,(2006) , 10.1063/1.2168489
P. F. Carcia, R. S. McLean, M. H. Reilly, M. D. Groner, S. M. George, Ca test of Al2O3 gas diffusion barriers grown by atomic layer deposition on polymers Applied Physics Letters. ,vol. 89, pp. 031915- ,(2006) , 10.1063/1.2221912
K. Tapily, J. E. Jakes, D. S. Stone, P. Shrestha, D. Gu, H. Baumgart, A. A. Elmustafa, Nanoindentation Investigation of HfO2 and Al2O3 Films Grown by Atomic Layer Deposition Journal of The Electrochemical Society. ,vol. 155, ,(2008) , 10.1149/1.2919106
Bo Gong, Qing Peng, Jesse S Jur, Christina K Devine, Kyoungmi Lee, Gregory N Parsons, Sequential Vapor Infiltration of Metal Oxides into Sacrificial Polyester Fibers: Shape Replication and Controlled Porosity of Microporous/Mesoporous Oxide Monoliths Chemistry of Materials. ,vol. 23, pp. 3476- 3485 ,(2011) , 10.1021/CM200694W
X ZHU, B ZHANG, J GAO, G ZHANG, Evaluation of the crack-initiation strain of a Cu-Ni multilayer on a flexible substrate Scripta Materialia. ,vol. 60, pp. 178- 181 ,(2009) , 10.1016/J.SCRIPTAMAT.2008.10.004
Shih-Hui Jen, Jacob A. Bertrand, Steven M. George, Critical tensile and compressive strains for cracking of Al2O3 films grown by atomic layer deposition Journal of Applied Physics. ,vol. 109, pp. 084305- ,(2011) , 10.1063/1.3567912
C. Charton, N. Schiller, M. Fahland, A. Holländer, A. Wedel, K. Noller, Development of high barrier films on flexible polymer substrates Thin Solid Films. ,vol. 502, pp. 99- 103 ,(2006) , 10.1016/J.TSF.2005.07.253
Sang-Il Park, Jong-Hyun Ahn, Xue Feng, Shuodao Wang, Yonggang Huang, John A. Rogers, Theoretical and Experimental Studies of Bending of Inorganic Electronic Materials on Plastic Substrates Advanced Functional Materials. ,vol. 18, pp. 2673- 2684 ,(2008) , 10.1002/ADFM.200800306
Riikka L. Puurunen, Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process Journal of Applied Physics. ,vol. 97, pp. 121301- ,(2005) , 10.1063/1.1940727
Paul Poodt, David C. Cameron, Eric Dickey, Steven M. George, Vladimir Kuznetsov, Gregory N. Parsons, Fred Roozeboom, Ganesh Sundaram, Ad Vermeer, Spatial atomic layer deposition: A route towards further industrialization of atomic layer deposition Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. ,vol. 30, pp. 010802- ,(2012) , 10.1116/1.3670745