Use of a reactive, or reducing gas as a method to increase contact lifetime in micro contact mems switch devices

摘要: A MEMS device comprises an electro mechanical element in a sealed chamber containing gas comprising reactive selected to react with any contaminants that may be present or formed on the operating surfaces of manner maximize electrical conductivity during operation device. The comprise switch having contacts as surfaces. hydrogen azane, optionally mixed inert gas, combination gases. corresponding process provides means substantially reduce eliminate devices devices.