On the kinetic energies of sputtered excited particles

摘要: Abstract Recent work on the sputtering of excited atoms and ions has included measurements light-vs.-distance. These were interpreted in terms kinetic energies particles led to conclusion that had distributions with threshld values, E ∗ , 10 2 −10 3 eV. The present is concerned developing a model, based theory recoil both energy, which capable rationalizing such high energies. calculations show, firstly, that, except for low as Li, recoil-sputtering yields are much larger than high-energy (i.e. E>E ) tails cascade-sputtering yields. Secondly, shown be experimental excited-state Tsong Yusuf. Thirdly, most interest, mean energy per recoil-sputtered atom found consistently either than, or similar to, .