Niobium and Tungsten Oxide Nanowires for Chemical Sensor

摘要: Abstract Thin films of tungsten and niobium (WNb) were the starting point for growth metal oxide nanowires. RF Magnetron sputtering was used to deposit a layer 100 nm on 2 · mm alumina substrates. Prepared samples thermally oxidized obtain nanostructures whose morphology investigated by scanning electron microscope (SEM). Structural properties these RAMAN spectroscopy. Functional characterization carried out using homemade test chamber. Interdigitated contacts heating elements deposited DC sputtering, bonded TO packages thanks gold wires. The gas sensing analyzed in wide range working temperatures different target gases order verify best condition.