A new method to integrate ZnO nano-tetrapods on MEMS micro-hotplates for large scale gas sensor production
作者： S L Marasso , A Tommasi , D Perrone , M Cocuzza , R Mosca
DOI: 10.1088/0957-4484/27/38/385503
关键词:
摘要: A new method, which is easily scalable to large scale production, has been developed obtain gas sensor devices based on zinc oxide (ZnO) nanostructures with a 'tetrapod' shape. The method can be extended other kinds of and the deposition ZnO through polymeric masks by centrifugation, directly onto properly designed MEMS micro-hotplates. micromachined devices, after mask peeled off, are ready for electrical bonding sensing test. Sensor response successfully measured some gases volatile organic compounds different chemical properties (ethanol, methane, nitrogen dioxide, hydrogen sulfide).
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Jordi Guilera, Cristian Fàbrega, Olga Casals, Francisco Hernández-Ramírez, Shuangzhou Wang, Sanjay Mathur, Florian Udrea, Andrea De Luca, S. Zeeshan Ali, Albert Romano-Rodríguez, J. Daniel Prades, Joan R. Morante, Facile integration of ordered nanowires in functional devices Sensors and Actuators B-chemical. ,vol. 221, pp. 104- 112 ,(2015) , 10.1016/J.SNB.2015.06.069
Shyamasree Gupta Chatterjee, Somenath Chatterjee, Ajoy K. Ray, Amit K. Chakraborty, Graphene–metal oxide nanohybrids for toxic gas sensor: A review Sensors and Actuators B-chemical. ,vol. 221, pp. 1170- 1181 ,(2015) , 10.1016/J.SNB.2015.07.070
In-Sung Hwang, Eui-Bok Lee, Sun-Jung Kim, Joong-Ki Choi, Jung-Ho Cha, Ho-Jun Lee, Byeong-Kwon Ju, Jong-Heun Lee, Gas sensing properties of SnO2 nanowires on micro-heater Sensors and Actuators B-chemical. ,vol. 154, pp. 295- 300 ,(2011) , 10.1016/J.SNB.2009.11.012
A. De Luca, M. T. Cole, R. H. Hopper, S. Boual, J. H. Warner, A. R. Robertson, S. Z. Ali, F. Udrea, J. W. Gardner, W. I. Milne, Enhanced spectroscopic gas sensors using in-situ grown carbon nanotubes Applied Physics Letters. ,vol. 106, pp. 194101- ,(2015) , 10.1063/1.4921170
Dario Zappa, Angela Bertuna, Elisabetta Comini, Martin Herold, Nicola Poli, Giorgio Sberveglieri, Tungsten Oxide Nanowires on Micro Hotplates for Gas Sensing Applications Procedia Engineering. ,vol. 120, pp. 439- 442 ,(2015) , 10.1016/J.PROENG.2015.08.663
Yue Zhang, Yun-hua Huang, Jian He, Ying Dai, Xiao-mei Zhang, Juan Liu, Qing-Liang Liao, Quasi One-dimensional ZnO Nanostructures Fabricated without Catalyst at Lower Temperature Frontiers of Physics in China. ,vol. 1, pp. 72- 84 ,(2006) , 10.1007/S11467-005-0006-4
Daejong Yang, M Kasyful Fuadi, Kyungnam Kang, Donghwan Kim, Zhiyong Li, Inkyu Park, None, Multiplexed Gas Sensor Based on Heterogeneous Metal Oxide Nanomaterial Array Enabled by Localized Liquid-Phase Reaction ACS Applied Materials & Interfaces. ,vol. 7, pp. 10152- 10161 ,(2015) , 10.1021/ACSAMI.5B00110
N. Tiwale, Zinc oxide nanowire gas sensors: fabrication, functionalisation and devices Materials Science and Technology. ,vol. 31, pp. 1681- 1697 ,(2015) , 10.1179/1743284714Y.0000000747
Isolde Simon, Nicolae Bârsan, Michael Bauer, Udo Weimar, Micromachined metal oxide gas sensors: opportunities to improve sensor performance Sensors and Actuators B: Chemical. ,vol. 73, pp. 1- 26 ,(2001) , 10.1016/S0925-4005(00)00639-0
R.M. Tiggelaar, R.G.P. Sanders, A.W. Groenland, J.G.E. Gardeniers, Stability of thin platinum films implemented in high-temperature microdevices Sensors and Actuators A-physical. ,vol. 152, pp. 39- 47 ,(2009) , 10.1016/J.SNA.2009.03.017