Tungsten Oxide Nanowires on Micro Hotplates for Gas Sensing Applications

摘要: Abstract Tungsten oxide nanowires (NWs) were successfully deposited on the membrane of micro hotplates (ams, Germany) by a very simple and scalable thermal oxidation technique. Synthetized nanostructures morphologically investigated mean FE-SEM (LEO 1525) structure was analysed X-Ray Diffraction Raman Spectroscopy. Micro mounted standard TO packages gold wires electro soldering in order to fabricate batch sensing devices. The performances fabricated devices tested towards some chemical compounds interest (NO 2 , Acetone, Ethanol CO). Firstly temperature screening performed, identify optimal working presence each target compound. Moreover, calibration curves obtained, influence humidity taken into account for NO2.