Deposition of rod-shaped antimony sulfide thin films from single-source antimony thiosemicarbazone precursors
作者： Jasmine B. Biswal , Narayan V. Sawant , Shivram S. Garje
DOI: 10.1016/J.TSF.2009.08.046
关键词:
摘要: … -assisted chemical vapour deposition (AACVD) using non-symmetrical antimony(III) dithiocarbamates, Sb[S 2 CN(Me)R] 3 (R = Bu, Hex, Bz) and by low-pressure chemical vapour …
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