Kerf with improved fill routine
作者： Sibina Sukman-Prahofer , Susanne Lachenmann , Ramona Winter , Valentin Rosskopf
DOI:
关键词:
摘要: A semiconductor disk which exhibits chip areas arranged next to one another and separated from by a kerf. The in each case exhibit multiplicity of similar device patterns, such that at least fill area with patterns is the kerf, kerf are essentially similarly constructed.
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