Unified characterization of surfaces and gases in MEMS devices

摘要: Chemical and physical materials-aging processes can significantly degrade the long-term performance reliability of dormant microsystems. This degradation results from materials interactions with evolving microenvironment by changing both bulk interfacial properties (e.g., mechanical fatigue strength, friction stiction, electrical resistance). Eventually, device function is clearly threatened as such, these aging are considered to have potential for high (negative) consequences. Sandia National Laboratories developing analytical characterization methodologies identifying chemical constituents packaged microsystem environments, test structures proving techniques. To accomplish this, we a MEMS containing expected exhibit dormancy/analytical challenges, extending range detection series techniques, merging data separate techniques greater information return, methods characterizing internal atmosphere/gases. Surface analyses extraction been demonstrated on surfaces various geometries different SAMS coatings, gas devices free volumes 3 microliters also demonstrated.