A Highly Reliable FRAM (Ferroelectric Random Access Memory)

作者: J.-H. Kim , D. J. Jung , Y. M. Kang , H. H. Kim , W. W. Jung

DOI: 10.1109/RELPHY.2007.369950

关键词:

摘要: 64 Mb FRAM with 1T1C (one-transistor and one-capacitor) cell architecture has progressed greatly for a robust level of reliability. Random-single-bits appeared from package-level tests are attributed mostly to extrinsic origins (e.g. interconnection failures) rather than intrinsic ones. The failures can be linked two activation energies: while one is 0.27 eV originated oxygen-vacancy movements at the top interface grain boundary in ferroelectric films, other 0.86 caused by imperfection either top-electrode contact (TEC), or bottom-electrode (BEC), both, capacitor. As result applying novel schemes remove analyzed defectives, we have no bit failure up 1000 hours over both high-temperature-operating-life (HTOL) high-temperature-storage (HTS)

参考文章(20)
T. Hayashi, Y. Igarashi, D. Inomata, T. Ichimori, T. Mitsuhashi, K. Ashikaga, T. Ito, M. Yoshimaru, M. Nagata, S. Mitarai, H. Godaiin, T. Nagahama, C. Isobe, H. Moriya, M. Shoji, Y. Ito, H. Kuroda, M. Sasaki, A novel stack capacitor cell for high density FeRAM compatible with CMOS logic international electron devices meeting. pp. 543- 546 ,(2002) , 10.1109/IEDM.2002.1175899
A. Itoh, Y. Hikosaka, T. Saito, H. Naganuma, H. Miyazawa, Y. Ozaki, Y. Kato, S. Mihara, H. Iwamoto, S. Mochizuki, M. Nakamura, T. Yamazaki, Mass-productive high performance 0.5 /spl mu/m embedded FRAM technology with triple layer metal symposium on vlsi technology. pp. 32- 33 ,(2000) , 10.1109/VLSIT.2000.852757
D. J. Jung, F. D. Morrison, M. Dawber, H. H. Kim, Kinam Kim, J. F. Scott, Effect of microgeometry on switching and transport in lead zirconate titanate capacitors: Implications for etching of nano-ferroelectrics Journal of Applied Physics. ,vol. 95, pp. 4968- 4975 ,(2004) , 10.1063/1.1688990
J. F. Scott, C. A. Araujo, B. M. Melnick, L. D. McMillan, R. Zuleeg, Quantitative measurement of space-charge effects in lead zirconate-titanate memories Journal of Applied Physics. ,vol. 70, pp. 382- 388 ,(1991) , 10.1063/1.350286
H.J. Joo, Y.J. Song, H.H. Kim, S.K. Kang, J.H. Park, Y.M. Kang, E.Y. Kang, S.Y. Lee, H.S. Jeong, Kinam Kim, Highly reliable and mass-productive FRAM embedded smartcard using advanced integration technologies symposium on vlsi technology. pp. 148- 149 ,(2004) , 10.1109/VLSIT.2004.1345445
H. M. Duiker, P. D. Beale, J. F. Scott, C. A. Paz de Araujo, B. M. Melnick, J. D. Cuchiaro, L. D. McMillan, Fatigue and switching in ferroelectric memories: Theory and experiment Journal of Applied Physics. ,vol. 68, pp. 5783- 5791 ,(1990) , 10.1063/1.346948
W. L. Warren, D. Dimos, B. A. Tuttle, R. D. Nasby, G. E. Pike, Electronic domain pinning in Pb(Zr,Ti)O3 thin films and its role in fatigue Applied Physics Letters. ,vol. 65, pp. 1018- 1020 ,(1994) , 10.1063/1.112211