The influence of an extrinsic interfacial layer on the polarization of sputtered BaTiO3 film
作者： Y. W. Cho , S. K. Choi , G. Venkata Rao
DOI: 10.1063/1.1921358
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摘要: As an origin of degradation remnant polarization in Pt∕BaTiO3∕Pt capacitor structure, interfacial layer formed at the interface BaTiO3 film and a Pt bottom electrode is considered. films were deposited on two types electrodes (La0.5Sr0.5CoO3 Pt) by radio frequency magnetron sputtering method both capacitors showed microstructural similarity with strong preferred orientations. However, Pt∕BaTiO3∕La0.5Sr0.5CoO3 exhibited saturated hysteresis loop (2Pr) 6μC∕cm2, for polarization-voltage curve revealed linear dielectric characteristic. From cross-sectional high-resolution transmission electron microscope analysis showing property, amorphous structure as well multidomain interior observed. It concluded that might help pol...
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