Mechanism of Enhanced Diffusion of Aluminum in 6H-SiC in the Process of High-Temperature Ion Implantation
作者： Igor O. Usov , A. A. Suvorova , V. V. Sokolov , Y. A. Kudryavtsev , A. V. Suvorov
DOI: 10.1557/PROC-504-141
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sci-hub.se 参考文章(9)
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