Microstructure devices, methods of forming a microstructure device and a method of forming a mems device
作者： Jeffrey D. Chinn , Vidyut Gopal
DOI:
关键词:
摘要: Microstructure devices, methods of forming a microstructure device and method MEMS are described. According to one aspect, includes: semiconductive substrate; monolithic feature coupled with the substrate, wherein at least portion is configured move relative conductive structure provided directly upon feature.
google.nl 参考文章(18)
Scott G. Adams, Timothy J. Davis, Integrated large area microstructures and micromechanical devices ,(2002)
Z. Lisa Zhang, Noel C. MacDonald, Method of forming compound stage MEM actuator suspended for multidimensional motion ,(1995)
Noel C. MacDonald, Zuoying L. Zhang, RIE process for fabricating submicron, silicon electromechanical structures ,(1992)
Liang-Yuh Chen, Noel C. MacDonald, Zuoying L. Zhang, Microdynamic release structure ,(1989)
Noel C. MacDonald, Zhoying L. Zhang, Gyorgy A. Porkolab, Process for fabricating submicron single crystal electromechanical structures ,(1993)
James G. Fleming, Bistable microelectromechanical actuator ,(1997)
Z L Zhang, N C MacDonald, A RIE process for submicron, silicon electromechanical structures Journal of Micromechanics and Microengineering. ,vol. 2, pp. 31- 38 ,(1992) , 10.1088/0960-1317/2/1/007
James H. Smith, William P. Eaton, Bevan D. Staple, Capacitance pressure sensor ,(1998)
Z.L. Zhang, N.C. MacDonald, An RIE process for submicron, silicon electromechanical structures TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers. pp. 520- 523 ,(1991) , 10.1109/SENSOR.1991.148927
L.Y. Chen, Z.L. Zhang, J.J. Yao, D.C. Thomas, N.C. MacDonald, Selective chemical vapor deposition of tungsten for microdynamic structures international conference on micro electro mechanical systems. pp. 82- 87 ,(1989) , 10.1109/MEMSYS.1989.77966