Preparation of single-phase Ti2AlN coating by magnetron sputtering with cost-efficient hot-pressed Ti-Al-N targets
作者： Yueming Li , Guorui Zhao , Hong Qi , Meishuan Li , Yufeng Zheng
DOI: 10.1016/J.CERAMINT.2018.06.055
关键词:
摘要: Abstract In the present research, single-phase Ti2AlN coatings were prepared on polycrystalline Al2O3 from cost-efficient hot-pressed Ti-Al-N targets by D.C. magnetron sputtering and subsequent annealing treatment. SEM, TEM XRD analyses performed to characterize microstructure phase constituents of target coating. The results reveal that affected synthesis temperature. When temperature was 700 °C, mainly comprised α-Ti, TiN Ti-Al intermetallics. While in synthesized at 900 °C, TiN, intermetallics main constituents. as-deposited both exhibited typical amorphous crystal structure．Crystallization coating initiated between 500 °C 600 °C. After 700 °C for 1 h, transformed general, could be obtained whether with or not. It element ratio Ti:Al:N = 2:1:1 (at%) rather than contents critical fabricate
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