Film thickness effect on fractality of tin-doped In 2 O 3 thin films
作者： Ştefan Ţălu , Sebastian Stach , Davood Raoufi , Fayegh Hosseinpanahi
DOI: 10.1007/S13391-015-4280-1
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摘要: In this paper, based on atomic force microscopy (AFM) data the surface morphology of tin-doped In2O3 (ITO) thin films, prepared by electron beam deposition method float glass substrates, was systematically investigated using multifractal analysis. Topographical characterization ITO film surfaces realized a novel approach which may be applied for AFM data. Detailed 3D topography obtained statistical parameters, according to ISO 25178-2: 2012. Multifractal analysis revealed that films have geometry. The generalized dimension Dq and singularity spectrum f(α) provided quantitative values characterize local scale properties at nanometer scale. Our results showed larger width Δα (Δα = αmax − αmin) spectra is related roughness.
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