Focal plane array with pixels defined by modulation of surface fermi energy

作者: Axel Reisinger , Mani Sundaram

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摘要: Pixels in a focal plane array are defined by controlled variation of the Fermi energy at surface detector array. Varying chemical composition semiconductor produces corresponding which electric field and electrostatic potential bulk below surface. This defines pixels having one each pixel different between pixels. modulation can also be applying an voltage V1 to metal pad defining pixel, V2 interconnected grid covering gaps all pads. Methods obviate need etch deep trenches pixels, resulting more manufacturable quasi-planar process without sacrificing performance.

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