Liquid application apparatus, liquid application method and imprinting system
作者： Kenichi Kodama
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摘要: A liquid application apparatus includes: a head including plurality of nozzles which eject droplets having functional properties toward substrate; relative movement device causes the and substrate to move relatively each other in direction; droplet ejection control operates at prescribed period so as deposit discretely onto an x-direction deposition pitch changing changes on x direction perpendicular y-direction y parallel direction.
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