Four-dimensional dielectric property image obtained from electron spectroscopic imaging series.

摘要: We have demonstrated a new quantitative method to characterize two- dimensional distributions of energy-dependent dielectric function mate- rials from low loss electron spectroscopic image (ESI) series. Two problems associated with extracted image-spectrum the low-loss series, under-sampling and energy resolution, were overcome by using fast Fourier transformation (FFT) interpolation maximum entropy decon- volution method. In this study, Black Diamond TM / Si 3 N 4 SiO 2 Si-substrate layer designed for copper metallization was used as sample. show that reconstructed (FFT interpolated deconvoluted) obtained ESI series images can be quantified same accuracy conventional energy-loss spectroscopy spectra. Since analysis is sensi- tive local thickness specimen Kramers-Kronig analysis, we also developed quantitatively determine constant low-k materials. determined extrapolated materi- als known constants. Using formula, die- lectric map deduced two-dimensional single scattering spectra providing information thickness. proposed four-dimensional data presentation revealing uniformity dependent property. The our methods depends on determination quality