Development, quantitative performance and applications of a parallel electron energy‐loss spectrum imaging system

摘要: SUMMARY The development of a parallel electron energy-loss spectrum imaging system is presented. The analytical performance the technique was investigated and applied to materials science problems. system, which allows acquisition storage at each pixel an image, developed by interfacing multichannel analyser microscope computer workstation. In experimental conditions used for imaging, detection limits quantification errors were large varied as function spatial resolution range chemical elements interest in image. Applications this showed that quantitative information provided use relative thickness maps detailed statistical analysis spectrum-image allowed unbiased interpretation images. As spectra are available after processing, spectroscopic about analysed material can be provide supplementary information.