Quantitative thin film analysis by energy filtering transmission electron microscopy

摘要: Abstract We have developed novel approaches to extract quantitative information from data obtained with the electron spectroscopic imaging (ESI) technique. The method is based on recording series of energy filtered images across inner shell loss edges and/or in low region. EEL spectra can be extracted out image for each pixel or a given area and used quantification, using standard EELS techniques. As examples, results thin layers titanium sapphire substrates grown by MBE calcium-content Si 3 N 4 grain boundary films will presented discussed. Using ESI range 0–150 eV thickness specimen determined log-ratio-technique. For specimens known geometry it also possible determine inelastic mean free path (MFP) different materials ( t / Λ )-maps. accuracy all techniques improved acquiring hollow-cone illumination (HCI), which reduces artefacts caused preservation elastic scattering contrast.