Thermal arched beam microelectromechanical structure

摘要: A MEMS actuator is provided that produces significant forces and displacements while consuming a reasonable amount of power. The includes microelectronic substrate, spaced apart supports on the substrate metallic arched beam extending between supports. also heater for heating to cause further arching beam. In order effectively transfer heat from beam, extends over spaced, albeit slightly, heater. As such, converts generated by into mechanical motion family other devices, such as relays, switching arrays valves, are include one or more actuators in take advantage its efficient operating characteristics. addition, method fabricating provided.