Introduction to focused ion beams : instrumentation, theory, techniques, and practice

摘要: The Focused Ion Beam Instrument.- - Solid Interactions.- Gases for Deposition and Enhanced Etch.- Three-Dimensional Nanofabrication Using Beams.- Device Edits Modifications.- Uses of Dual FIB in Microelectronic Failure Analysis.- High Resolution Live Imaging Milling Processes Optimum Accuracy.- Materials Science Applications a Review.- Practical Aspects Tem Specimen Preparation.- Lift-Out Preparation Techniques.- A Micro-Sampling Technique Site Specific TEM Method.- Dual-Beam (FIB-SEM) Systems.- Secondary Mass Spectrometry (FIB-SIMS).- Quantitative Analysis Microscopy.- Application Combination with Auger Electron Spectroscopy.