Stacked load lock chamber and substrate processing apparatus including the same
作者： Toshikazu Nakazawa , Hirofumi Asanuma
DOI:
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摘要: A stacked load lock chamber comprises a first chamber, second on the slit-valve mover configured to open and close opening provided an atmosphere side of arm connected mover, driver located below chambers drive arms move movers through arms.
lens.org 参考文章(2)
Tsutomu Hiroki, Gate valve for semiconductor treatment system and vacuum container ,(2004)
Jae-Chull Lee, William N. Sterling, Sam Hyungsam Kim, Paul Brown, Valve door with ball coupling ,(2007)