Interfacial characteristics and dielectric properties of Ba0.65Sr0.35TiO3 thin films
作者： Zuci Quan , Baishun Zhang , Tianjin Zhang , Xingzhong Zhao , Ruikun Pan
DOI: 10.1016/J.TSF.2007.06.148
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摘要: Abstract Ba0.65Sr0.35TiO3 (BST) thin films were deposited on Pt/Ti/SiO2/Si substrates by radio frequency magnetron sputtering technique. X-ray photoelectron spectroscopy (XPS) depth profiling data show that each element component of the BST film possesses a uniform distribution from outermost surface to subsurface, but obvious Ti-rich is present BST/Pt interface because Ti4+ cations are partially reduced form amorphous oxides such as TiOx (x
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