作者: Hiroto Sugahara
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摘要: A substrate mounted with an electronic element thereon, comprises a base, insulator, fluid passage, and pressurizer. The base is made of metal. insulator ceramic material provided on one face the base. has heat-generating its side facing contrary to face. passage formed within have liquid flow therethrough, radiates heat which been transmitted from via pressurizer applies pressure passage. includes pressurizing chamber actuator unit. unit changes volume by displacing portion corresponding respect direction perpendicular