A silicon condenser microphone with polyimide diaphragm and backplate
作者： Michael Pedersen , Wouter Olthuis , Piet Bergveld
DOI: 10.1016/S0924-4247(97)01532-X
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摘要: … The final step in the fabrication process was to release the polyimide diaphragms by etching the remaining silicon under the diaphragm. This was done in an Electrotech PF 340 reactive …
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