Mechanism and dynamics of block copolymer directed assembly with density multiplication on chemically patterned surfaces

作者: Guoliang Liu , Sean P Delcambre , Karl O Stuen , Gordon SW Craig , Juan J De Pablo

DOI: 10.1116/1.3518918

关键词:

摘要: In this work, we used scanning electron microscopy (SEM), in situ coherent small angle x-ray scattering (SAXS), and Monte Carlo molecular simulation to gain insights into the dynamics of block copolymer directed assembly with density multiplication on chemically patterned surfaces. During assembly, it was observed SEM that poly(styrene-block-methyl methacrylate) initially formed discrete polystyrene domains lacked long-range order at free surface. After further annealing, gradually coalesced linear were not registered fully underlying chemical pattern. The could be trapped metastable morphologies. Finally, perpendicular lamellae full registration It revealed SAXS peaks characteristic period pattern appeared disappeared early stages assembly. morphological evolutio...

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