Development of MEMS MOS gas sensors with CMOS compatible PECVD inter-metal passivation
作者： Alvise Bagolini , Andrea Gaiardo , Michele Crivellari , Evgeny Demenev , Ruben Bartali
DOI: 10.1016/J.SNB.2019.04.116
关键词:
摘要: … SOG and PECVD layers degrade at high temperature are reported in the literature: spin-on glass develops high thermal stress … Nevertheless, with respect to SOG, PECVD technology …
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