Synthesis of new vinyl ether functionalized silica for UV-patterning

摘要: We report a new ORganically MOdified SILicates (ORMOSILs) stable sol based on vinyl ether function which can be deposited as layer and structured by mean of UV radiation through mask or direct laser writing. Silica matrix is synthesized sol–gel process organic network formed photopolymerization. One the potential applications fabrication integrated optical circuits. [2-(3,4 epoxycyclohexyl ethyltrimethoxysilane)] has already used for such devices to develop microstructures an substrate cationic polymerization. Obtained results show some weakness important contribution OH aliphatic CH groups attenuation at 1550 nm wavelength low conversion rate polymerization involving poor mechanical properties. This work treats design generation hybrid materials with very high reactivity amount involved in attenuation. have chosen reactive part her highest via way. The molecule 4-vinylether phenyltriethoxysilane. Sol–gel kinetic reactions were monitored liquid 29Si-NMR spectroscopy. In order obtain multifunctional oligomers lowest groups, hydrolysis polycondensation followed time, temperature pH water conditions. Finally, we feasibility microstructure films this sol.