Design, fabrication and modeling of microbeam structures for gas sensor applications in CMOS technology

摘要: In this paper we discuss the design, fabrication, and modeling of an electrostatically actuated transducer that is operated in a resonant mode. The designed for gas sensor applications. microstructure with high-aspect ratio laminated beam or bridge suspensions, has been fabricated using 0.6 /spl mu/m three metal, double poly CMOS process. chip was post processed by sequence two maskless dry etching steps. A thin sorbent polymer layer included design microbeam chemical sensor. devices were to provide relatively large surface area coat polymer. Gas sorption can be monitored as function frequency device. device measured piezoresistors mounted Wheatstone configuration. sensors are intended use monitoring hazardous gases vapors. order optimize frequencies, variety structures different dimensions. These modeled finite element analysis program. number selected single design.